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Conical Nanotubes Synthesized by Atomic Layer Deposition of Al(2)O(3), TiO(2), and SiO(2) in Etched Ion-Track Nanochannels

Etched ion-track polycarbonate membranes with conical nanochannels of aspect ratios of ~3000 are coated with Al(2)O(3), TiO(2), and SiO(2) thin films of thicknesses between 10 and 20 nm by atomic layer deposition (ALD). By combining ion-track technology and ALD, the fabrication of two kinds of funct...

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Detalles Bibliográficos
Autores principales:	Ulrich, Nils, Spende, Anne, Burr, Loïc, Sobel, Nicolas, Schubert, Ina, Hess, Christian, Trautmann, Christina, Toimil-Molares, Maria Eugenia
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8399865/ https://www.ncbi.nlm.nih.gov/pubmed/34443705 http://dx.doi.org/10.3390/nano11081874

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