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Fabrication and Characterization of Inverted Silicon Pyramidal Arrays with Randomly Distributed Nanoholes

We report the fabrication, electromagnetic simulation and measurement of inverted silicon pyramidal arrays with randomly distributed nanoholes that act as an anti-reflectivity coating. The fabrication route combines the advantages of anisotropic wet etching and metal-assisted chemical etching. The f...

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Detalles Bibliográficos
Autores principales:	Zhao, Yue, Zhang, Kaiping, Li, Hailiang, Xie, Changqing
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8400036/ https://www.ncbi.nlm.nih.gov/pubmed/34442553 http://dx.doi.org/10.3390/mi12080931

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