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Hydrogen-Terminated Diamond Surface as a Gas Sensor: A Comparative Study of Its Sensitivities

A nanocrystalline diamond (NCD) layer is used as an active (sensing) part of a conductivity gas sensor. The properties of the sensor with an NCD with H-termination (response and time characteristic of resistance change) are measured by the same equipment with a similar setup and compared with commer...

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Autores principales: Kočí, Michal, Kromka, Alexander, Bouřa, Adam, Szabó, Ondrej, Husák, Miroslav
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8400072/
https://www.ncbi.nlm.nih.gov/pubmed/34450831
http://dx.doi.org/10.3390/s21165390
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author Kočí, Michal
Kromka, Alexander
Bouřa, Adam
Szabó, Ondrej
Husák, Miroslav
author_facet Kočí, Michal
Kromka, Alexander
Bouřa, Adam
Szabó, Ondrej
Husák, Miroslav
author_sort Kočí, Michal
collection PubMed
description A nanocrystalline diamond (NCD) layer is used as an active (sensing) part of a conductivity gas sensor. The properties of the sensor with an NCD with H-termination (response and time characteristic of resistance change) are measured by the same equipment with a similar setup and compared with commercial sensors, a conductivity sensor with a metal oxide (MO(X)) active material (resistance change), and an infrared pyroelectric sensor (output voltage change) in this study. The deposited layer structure is characterized and analyzed by Scanning Electron Microscopy (SEM) and Raman spectroscopy. Electrical properties (resistance change for conductivity sensors and output voltage change for the IR pyroelectric sensor) are examined for two types of gases, oxidizing (NO(2)) and reducing (NH(3)). The parameters of the tested sensors are compared and critically evaluated. Subsequently, differences in the gas sensing principles of these conductivity sensors, namely H-terminated NCD and SnO(2), are described.
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spelling pubmed-84000722021-08-29 Hydrogen-Terminated Diamond Surface as a Gas Sensor: A Comparative Study of Its Sensitivities Kočí, Michal Kromka, Alexander Bouřa, Adam Szabó, Ondrej Husák, Miroslav Sensors (Basel) Article A nanocrystalline diamond (NCD) layer is used as an active (sensing) part of a conductivity gas sensor. The properties of the sensor with an NCD with H-termination (response and time characteristic of resistance change) are measured by the same equipment with a similar setup and compared with commercial sensors, a conductivity sensor with a metal oxide (MO(X)) active material (resistance change), and an infrared pyroelectric sensor (output voltage change) in this study. The deposited layer structure is characterized and analyzed by Scanning Electron Microscopy (SEM) and Raman spectroscopy. Electrical properties (resistance change for conductivity sensors and output voltage change for the IR pyroelectric sensor) are examined for two types of gases, oxidizing (NO(2)) and reducing (NH(3)). The parameters of the tested sensors are compared and critically evaluated. Subsequently, differences in the gas sensing principles of these conductivity sensors, namely H-terminated NCD and SnO(2), are described. MDPI 2021-08-10 /pmc/articles/PMC8400072/ /pubmed/34450831 http://dx.doi.org/10.3390/s21165390 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Kočí, Michal
Kromka, Alexander
Bouřa, Adam
Szabó, Ondrej
Husák, Miroslav
Hydrogen-Terminated Diamond Surface as a Gas Sensor: A Comparative Study of Its Sensitivities
title Hydrogen-Terminated Diamond Surface as a Gas Sensor: A Comparative Study of Its Sensitivities
title_full Hydrogen-Terminated Diamond Surface as a Gas Sensor: A Comparative Study of Its Sensitivities
title_fullStr Hydrogen-Terminated Diamond Surface as a Gas Sensor: A Comparative Study of Its Sensitivities
title_full_unstemmed Hydrogen-Terminated Diamond Surface as a Gas Sensor: A Comparative Study of Its Sensitivities
title_short Hydrogen-Terminated Diamond Surface as a Gas Sensor: A Comparative Study of Its Sensitivities
title_sort hydrogen-terminated diamond surface as a gas sensor: a comparative study of its sensitivities
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8400072/
https://www.ncbi.nlm.nih.gov/pubmed/34450831
http://dx.doi.org/10.3390/s21165390
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