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Hydrogen-Terminated Diamond Surface as a Gas Sensor: A Comparative Study of Its Sensitivities
A nanocrystalline diamond (NCD) layer is used as an active (sensing) part of a conductivity gas sensor. The properties of the sensor with an NCD with H-termination (response and time characteristic of resistance change) are measured by the same equipment with a similar setup and compared with commer...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8400072/ https://www.ncbi.nlm.nih.gov/pubmed/34450831 http://dx.doi.org/10.3390/s21165390 |
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author | Kočí, Michal Kromka, Alexander Bouřa, Adam Szabó, Ondrej Husák, Miroslav |
author_facet | Kočí, Michal Kromka, Alexander Bouřa, Adam Szabó, Ondrej Husák, Miroslav |
author_sort | Kočí, Michal |
collection | PubMed |
description | A nanocrystalline diamond (NCD) layer is used as an active (sensing) part of a conductivity gas sensor. The properties of the sensor with an NCD with H-termination (response and time characteristic of resistance change) are measured by the same equipment with a similar setup and compared with commercial sensors, a conductivity sensor with a metal oxide (MO(X)) active material (resistance change), and an infrared pyroelectric sensor (output voltage change) in this study. The deposited layer structure is characterized and analyzed by Scanning Electron Microscopy (SEM) and Raman spectroscopy. Electrical properties (resistance change for conductivity sensors and output voltage change for the IR pyroelectric sensor) are examined for two types of gases, oxidizing (NO(2)) and reducing (NH(3)). The parameters of the tested sensors are compared and critically evaluated. Subsequently, differences in the gas sensing principles of these conductivity sensors, namely H-terminated NCD and SnO(2), are described. |
format | Online Article Text |
id | pubmed-8400072 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2021 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-84000722021-08-29 Hydrogen-Terminated Diamond Surface as a Gas Sensor: A Comparative Study of Its Sensitivities Kočí, Michal Kromka, Alexander Bouřa, Adam Szabó, Ondrej Husák, Miroslav Sensors (Basel) Article A nanocrystalline diamond (NCD) layer is used as an active (sensing) part of a conductivity gas sensor. The properties of the sensor with an NCD with H-termination (response and time characteristic of resistance change) are measured by the same equipment with a similar setup and compared with commercial sensors, a conductivity sensor with a metal oxide (MO(X)) active material (resistance change), and an infrared pyroelectric sensor (output voltage change) in this study. The deposited layer structure is characterized and analyzed by Scanning Electron Microscopy (SEM) and Raman spectroscopy. Electrical properties (resistance change for conductivity sensors and output voltage change for the IR pyroelectric sensor) are examined for two types of gases, oxidizing (NO(2)) and reducing (NH(3)). The parameters of the tested sensors are compared and critically evaluated. Subsequently, differences in the gas sensing principles of these conductivity sensors, namely H-terminated NCD and SnO(2), are described. MDPI 2021-08-10 /pmc/articles/PMC8400072/ /pubmed/34450831 http://dx.doi.org/10.3390/s21165390 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Kočí, Michal Kromka, Alexander Bouřa, Adam Szabó, Ondrej Husák, Miroslav Hydrogen-Terminated Diamond Surface as a Gas Sensor: A Comparative Study of Its Sensitivities |
title | Hydrogen-Terminated Diamond Surface as a Gas Sensor: A Comparative Study of Its Sensitivities |
title_full | Hydrogen-Terminated Diamond Surface as a Gas Sensor: A Comparative Study of Its Sensitivities |
title_fullStr | Hydrogen-Terminated Diamond Surface as a Gas Sensor: A Comparative Study of Its Sensitivities |
title_full_unstemmed | Hydrogen-Terminated Diamond Surface as a Gas Sensor: A Comparative Study of Its Sensitivities |
title_short | Hydrogen-Terminated Diamond Surface as a Gas Sensor: A Comparative Study of Its Sensitivities |
title_sort | hydrogen-terminated diamond surface as a gas sensor: a comparative study of its sensitivities |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8400072/ https://www.ncbi.nlm.nih.gov/pubmed/34450831 http://dx.doi.org/10.3390/s21165390 |
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