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Resolution-Enhancing Structure for the Electric Field Microsensor Chip

Electrostatic voltage is a vital parameter in industrial production lines, for reducing electrostatic discharge harms and improving yields. Due to such drawbacks as package shielding and low resolution, previously reported electric field microsensors are still not applicable for industrial static mo...

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Detalles Bibliográficos
Autores principales: Wen, Xiaolong, Yang, Pengfei, Zhang, Zhouwei, Chu, Zhaozhi, Peng, Chunrong, Liu, Yutao, Wu, Shuang, Zhang, Bo, Zheng, Fengjie
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8400472/
https://www.ncbi.nlm.nih.gov/pubmed/34442558
http://dx.doi.org/10.3390/mi12080936
_version_ 1783745322964484096
author Wen, Xiaolong
Yang, Pengfei
Zhang, Zhouwei
Chu, Zhaozhi
Peng, Chunrong
Liu, Yutao
Wu, Shuang
Zhang, Bo
Zheng, Fengjie
author_facet Wen, Xiaolong
Yang, Pengfei
Zhang, Zhouwei
Chu, Zhaozhi
Peng, Chunrong
Liu, Yutao
Wu, Shuang
Zhang, Bo
Zheng, Fengjie
author_sort Wen, Xiaolong
collection PubMed
description Electrostatic voltage is a vital parameter in industrial production lines, for reducing electrostatic discharge harms and improving yields. Due to such drawbacks as package shielding and low resolution, previously reported electric field microsensors are still not applicable for industrial static monitoring uses. In this paper, we introduce a newly designed microsensor package structure, which enhances the field strength inside the package cavity remarkably. This magnification effect was studied and optimized by both theoretical calculation and ANSYS simulation. By means of the digital synthesizer and digital coherent demodulation method, the compact signal processing circuit for the packaged microsensor was also developed. The meter prototype was calibrated above a charged metal plate, and the electric field resolution was 5 V/m, while the measuring error was less than 3 V, from −1 kV to 1 kV in a 2 cm distance. The meter was also installed into a production line and showed good consistency with, and better resolution than, a traditional vibratory capacitance sensor.
format Online
Article
Text
id pubmed-8400472
institution National Center for Biotechnology Information
language English
publishDate 2021
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-84004722021-08-29 Resolution-Enhancing Structure for the Electric Field Microsensor Chip Wen, Xiaolong Yang, Pengfei Zhang, Zhouwei Chu, Zhaozhi Peng, Chunrong Liu, Yutao Wu, Shuang Zhang, Bo Zheng, Fengjie Micromachines (Basel) Article Electrostatic voltage is a vital parameter in industrial production lines, for reducing electrostatic discharge harms and improving yields. Due to such drawbacks as package shielding and low resolution, previously reported electric field microsensors are still not applicable for industrial static monitoring uses. In this paper, we introduce a newly designed microsensor package structure, which enhances the field strength inside the package cavity remarkably. This magnification effect was studied and optimized by both theoretical calculation and ANSYS simulation. By means of the digital synthesizer and digital coherent demodulation method, the compact signal processing circuit for the packaged microsensor was also developed. The meter prototype was calibrated above a charged metal plate, and the electric field resolution was 5 V/m, while the measuring error was less than 3 V, from −1 kV to 1 kV in a 2 cm distance. The meter was also installed into a production line and showed good consistency with, and better resolution than, a traditional vibratory capacitance sensor. MDPI 2021-08-07 /pmc/articles/PMC8400472/ /pubmed/34442558 http://dx.doi.org/10.3390/mi12080936 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Wen, Xiaolong
Yang, Pengfei
Zhang, Zhouwei
Chu, Zhaozhi
Peng, Chunrong
Liu, Yutao
Wu, Shuang
Zhang, Bo
Zheng, Fengjie
Resolution-Enhancing Structure for the Electric Field Microsensor Chip
title Resolution-Enhancing Structure for the Electric Field Microsensor Chip
title_full Resolution-Enhancing Structure for the Electric Field Microsensor Chip
title_fullStr Resolution-Enhancing Structure for the Electric Field Microsensor Chip
title_full_unstemmed Resolution-Enhancing Structure for the Electric Field Microsensor Chip
title_short Resolution-Enhancing Structure for the Electric Field Microsensor Chip
title_sort resolution-enhancing structure for the electric field microsensor chip
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8400472/
https://www.ncbi.nlm.nih.gov/pubmed/34442558
http://dx.doi.org/10.3390/mi12080936
work_keys_str_mv AT wenxiaolong resolutionenhancingstructurefortheelectricfieldmicrosensorchip
AT yangpengfei resolutionenhancingstructurefortheelectricfieldmicrosensorchip
AT zhangzhouwei resolutionenhancingstructurefortheelectricfieldmicrosensorchip
AT chuzhaozhi resolutionenhancingstructurefortheelectricfieldmicrosensorchip
AT pengchunrong resolutionenhancingstructurefortheelectricfieldmicrosensorchip
AT liuyutao resolutionenhancingstructurefortheelectricfieldmicrosensorchip
AT wushuang resolutionenhancingstructurefortheelectricfieldmicrosensorchip
AT zhangbo resolutionenhancingstructurefortheelectricfieldmicrosensorchip
AT zhengfengjie resolutionenhancingstructurefortheelectricfieldmicrosensorchip