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Resolution-Enhancing Structure for the Electric Field Microsensor Chip

Electrostatic voltage is a vital parameter in industrial production lines, for reducing electrostatic discharge harms and improving yields. Due to such drawbacks as package shielding and low resolution, previously reported electric field microsensors are still not applicable for industrial static mo...

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Detalles Bibliográficos
Autores principales:	Wen, Xiaolong, Yang, Pengfei, Zhang, Zhouwei, Chu, Zhaozhi, Peng, Chunrong, Liu, Yutao, Wu, Shuang, Zhang, Bo, Zheng, Fengjie
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8400472/ https://www.ncbi.nlm.nih.gov/pubmed/34442558 http://dx.doi.org/10.3390/mi12080936

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