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Design Approach for Reducing Cross-Axis Sensitivity in a Single-Drive Multi-Axis MEMS Gyroscope

In this paper, a new design technique is presented to estimate and reduce the cross-axis sensitivity (CAS) in a single-drive multi-axis microelectromechanical systems (MEMS) gyroscope. A simplified single-drive multi-axis MEMS gyroscope, based on a mode-split approach, was analyzed for cross-axis se...

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Detalles Bibliográficos
Autores principales:	Din, Hussamud, Iqbal, Faisal, Lee, Byeungleul
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8401296/ https://www.ncbi.nlm.nih.gov/pubmed/34442524 http://dx.doi.org/10.3390/mi12080902

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