Cargando…

Design Approach for Reducing Cross-Axis Sensitivity in a Single-Drive Multi-Axis MEMS Gyroscope

In this paper, a new design technique is presented to estimate and reduce the cross-axis sensitivity (CAS) in a single-drive multi-axis microelectromechanical systems (MEMS) gyroscope. A simplified single-drive multi-axis MEMS gyroscope, based on a mode-split approach, was analyzed for cross-axis se...

Descripción completa

Detalles Bibliográficos
Autores principales:	Din, Hussamud, Iqbal, Faisal, Lee, Byeungleul
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8401296/ https://www.ncbi.nlm.nih.gov/pubmed/34442524 http://dx.doi.org/10.3390/mi12080902

Ejemplares similares

Sensitivity Analysis of Single-Drive, 3-axis MEMS Gyroscope Using COMSOL Multiphysics
por: Din, Hussamud, et al.
Publicado: (2020)

Single Drive Multi-Axis Gyroscope with High Dynamic Range, High Linearity and Wide Bandwidth
por: Iqbal, Faisal, et al.
Publicado: (2019)

Bias-Repeatability Analysis of Vacuum-Packaged 3-Axis MEMS Gyroscope Using Oven-Controlled System
por: Din, Hussamud, et al.
Publicado: (2022)

A Digital Interface ASIC for Triple-Axis MEMS Vibratory Gyroscopes
por: Lv, Risheng, et al.
Publicado: (2020)

Cross-Axis Coupling Effects in Single-Axis Nuclear Magnetic Resonance Gyroscopes
por: Wang, Zhiguo, et al.
Publicado: (2020)

A Study on Measurement Variations in Resonant Characteristics of Electrostatically Actuated MEMS Resonators
por: Iqbal, Faisal, et al.
Publicado: (2018)

An Interface ASIC Design of MEMS Gyroscope with Analog Closed Loop Driving
por: Zhang, Huan, et al.
Publicado: (2023)

Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope
por: Si, Chaowei, et al.
Publicado: (2013)

Design of a Novel MEMS Gyroscope Array
por: Wang, Wei, et al.
Publicado: (2013)

An Interface ASIC for MEMS Vibratory Gyroscopes with Nonlinear Driving Control
por: Lv, Risheng, et al.
Publicado: (2019)

A Multi-Fork Z-Axis Quartz Micromachined Gyroscope
por: Feng, Lihui, et al.
Publicado: (2013)

MEMS vibratory gyroscopes : structural approaches to improve robustness /
por: Acar, Cenk
Publicado: (2009)

MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control
por: Cui, Min, et al.
Publicado: (2019)

A Self-Oscillating Driving Circuit for Low-Q MEMS Vibratory Gyroscopes
por: Han, Tian, et al.
Publicado: (2023)

Design and Mechanical Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Leverage Mechanism
por: Li, Zezhang, et al.
Publicado: (2019)

A New MEMS Gyroscope Used for Single-Channel Damping
por: Zhang, Zengping, et al.
Publicado: (2015)

Design of a Tri-Axial Surface Micromachined MEMS Vibrating Gyroscope
por: Crescenzi, Rocco, et al.
Publicado: (2020)

Design and Optimization of a Novel MEMS Tuning Fork Gyroscope Microstructure
por: Xiong, Chuanguo, et al.
Publicado: (2022)

Design and Vibration Sensitivity Analysis of a MEMS Tuning Fork Gyroscope with an Anchored Diamond Coupling Mechanism
por: Guan, Yanwei, et al.
Publicado: (2016)

Design and Analysis of a High-Gain and Robust Multi-DOF Electro-thermally Actuated MEMS Gyroscope
por: Saqib, Muhammad, et al.
Publicado: (2018)

A Design Methodology of Digital Control System for MEMS Gyroscope Based on Multi-Objective Parameter Optimization
por: Gu, Haoyu, et al.
Publicado: (2020)

MEMS Gyroscopes Based on Acoustic Sagnac Effect (†)
por: Yu, Yuanyuan, et al.
Publicado: (2016)

The Characteristics and Locking Process of Nonlinear MEMS Gyroscopes
por: Su, Yan, et al.
Publicado: (2020)

Thermoelastic damping in MEMS gyroscopes at high frequencies
por: Schiwietz, Daniel, et al.
Publicado: (2023)

Development and Research of the Sensitive Element of the MEMS Gyroscope Manufactured Using SOI Technology
por: Naumenko, Danil, et al.
Publicado: (2023)

Gait Detection in Children with and without Hemiplegia Using Single-Axis Wearable Gyroscopes
por: Abaid, Nicole, et al.
Publicado: (2013)

Design and Simulation of a MEMS Control Moment Gyroscope for the Sub-Kilogram Spacecraft
por: Chang, Honglong, et al.
Publicado: (2010)

Design and Implementation of a Dual-Mass MEMS Gyroscope with High Shock Resistance
por: Gao, Yang, et al.
Publicado: (2018)

Design, Fabrication and Experiment of Double U-Beam MEMS Vibration Ring Gyroscope
por: Cao, Huiliang, et al.
Publicado: (2019)

Design of Readout Circuit with Quadrature Error and Auxiliary PLL for MEMS Vibratory Gyroscope
por: Chen, Hua, et al.
Publicado: (2020)

Design, Fabrication, and Modeling of a Novel Dual-Axis Control Input PZT Gyroscope
por: Chang, Cheng-Yang, et al.
Publicado: (2017)

An Integrated MEMS Gyroscope Array with Higher Accuracy Output
por: Chang, Honglong, et al.
Publicado: (2008)

Energy Loss in a MEMS Disk Resonator Gyroscope
por: Xie, Jianbing, et al.
Publicado: (2019)

A Novel MEMS Gyroscope In-Self Calibration Approach
por: Zhou, Qifan, et al.
Publicado: (2020)

Design of a 1-bit MEMS Gyroscope using the Model Predictive Control Approach
por: Wu, Xiaofeng, et al.
Publicado: (2019)

Observability Analysis of a MEMS INS/GPS Integration System with Gyroscope G-Sensitivity Errors
por: Fan, Chen, et al.
Publicado: (2014)

Track Detection in Railway Sidings Based on MEMS Gyroscope Sensors
por: Broquetas, Antoni, et al.
Publicado: (2012)

Mechanical and Electrical Noise in Sense Channel of MEMS Vibratory Gyroscopes
por: Ding, Xukai, et al.
Publicado: (2017)

Vibration-Induced Errors in MEMS Tuning Fork Gyroscopes with Imbalance
por: Fang, Xiang, et al.
Publicado: (2018)

Research on Filtering Algorithm of MEMS Gyroscope Based on Information Fusion
por: Guo, Hui, et al.
Publicado: (2019)

Cannot write session to /tmp/vufind_sessions/sess_ci6soe6aaedn08pjo1f35sp7e1