Cargando…

Reliable Fabrication of Graphene Nanostructure Based on e-Beam Irradiation of PMMA/Copper Composite Structure

Graphene nanostructures are widely perceived as a promising material for fundamental components; their high-performance electronic properties offer the potential for the construction of graphene nanoelectronics. Numerous researchers have paid attention to the fabrication of graphene nanostructures,...

Descripción completa

Detalles Bibliográficos
Autores principales: Bi, Kaixi, Mu, Jiliang, Geng, Wenping, Mei, Linyu, Zhou, Siyuan, Niu, Yaokai, Fu, Wenxiao, Tan, Ligang, Han, Shuqi, Chou, Xiujian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8401420/
https://www.ncbi.nlm.nih.gov/pubmed/34443158
http://dx.doi.org/10.3390/ma14164634
_version_ 1783745547066146816
author Bi, Kaixi
Mu, Jiliang
Geng, Wenping
Mei, Linyu
Zhou, Siyuan
Niu, Yaokai
Fu, Wenxiao
Tan, Ligang
Han, Shuqi
Chou, Xiujian
author_facet Bi, Kaixi
Mu, Jiliang
Geng, Wenping
Mei, Linyu
Zhou, Siyuan
Niu, Yaokai
Fu, Wenxiao
Tan, Ligang
Han, Shuqi
Chou, Xiujian
author_sort Bi, Kaixi
collection PubMed
description Graphene nanostructures are widely perceived as a promising material for fundamental components; their high-performance electronic properties offer the potential for the construction of graphene nanoelectronics. Numerous researchers have paid attention to the fabrication of graphene nanostructures, based on both top-down and bottom-up approaches. However, there are still some unavoidable challenges, such as smooth edges, uniform films without folds, and accurate dimension and location control. In this work, a direct writing method was reported for the in-situ preparation of a high-resolution graphene nanostructure of controllable size (the minimum feature size is about 15 nm), which combines the advantages of e-beam lithography and copper-catalyzed growth. By using the Fourier infrared absorption test, we found that the hydrogen and oxygen elements were disappearing due to knock-on displacement and the radiolysis effect. The graphene crystal is also formed via diffusion and the local heating effect between the e-beam and copper substrate, based on the Raman spectra test. This simple process for the in-situ synthesis of graphene nanostructures has many promising potential applications, including offering a way to make nanoelectrodes, NEMS cantilever resonant structures, nanophotonic devices and so on.
format Online
Article
Text
id pubmed-8401420
institution National Center for Biotechnology Information
language English
publishDate 2021
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-84014202021-08-29 Reliable Fabrication of Graphene Nanostructure Based on e-Beam Irradiation of PMMA/Copper Composite Structure Bi, Kaixi Mu, Jiliang Geng, Wenping Mei, Linyu Zhou, Siyuan Niu, Yaokai Fu, Wenxiao Tan, Ligang Han, Shuqi Chou, Xiujian Materials (Basel) Article Graphene nanostructures are widely perceived as a promising material for fundamental components; their high-performance electronic properties offer the potential for the construction of graphene nanoelectronics. Numerous researchers have paid attention to the fabrication of graphene nanostructures, based on both top-down and bottom-up approaches. However, there are still some unavoidable challenges, such as smooth edges, uniform films without folds, and accurate dimension and location control. In this work, a direct writing method was reported for the in-situ preparation of a high-resolution graphene nanostructure of controllable size (the minimum feature size is about 15 nm), which combines the advantages of e-beam lithography and copper-catalyzed growth. By using the Fourier infrared absorption test, we found that the hydrogen and oxygen elements were disappearing due to knock-on displacement and the radiolysis effect. The graphene crystal is also formed via diffusion and the local heating effect between the e-beam and copper substrate, based on the Raman spectra test. This simple process for the in-situ synthesis of graphene nanostructures has many promising potential applications, including offering a way to make nanoelectrodes, NEMS cantilever resonant structures, nanophotonic devices and so on. MDPI 2021-08-17 /pmc/articles/PMC8401420/ /pubmed/34443158 http://dx.doi.org/10.3390/ma14164634 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Bi, Kaixi
Mu, Jiliang
Geng, Wenping
Mei, Linyu
Zhou, Siyuan
Niu, Yaokai
Fu, Wenxiao
Tan, Ligang
Han, Shuqi
Chou, Xiujian
Reliable Fabrication of Graphene Nanostructure Based on e-Beam Irradiation of PMMA/Copper Composite Structure
title Reliable Fabrication of Graphene Nanostructure Based on e-Beam Irradiation of PMMA/Copper Composite Structure
title_full Reliable Fabrication of Graphene Nanostructure Based on e-Beam Irradiation of PMMA/Copper Composite Structure
title_fullStr Reliable Fabrication of Graphene Nanostructure Based on e-Beam Irradiation of PMMA/Copper Composite Structure
title_full_unstemmed Reliable Fabrication of Graphene Nanostructure Based on e-Beam Irradiation of PMMA/Copper Composite Structure
title_short Reliable Fabrication of Graphene Nanostructure Based on e-Beam Irradiation of PMMA/Copper Composite Structure
title_sort reliable fabrication of graphene nanostructure based on e-beam irradiation of pmma/copper composite structure
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8401420/
https://www.ncbi.nlm.nih.gov/pubmed/34443158
http://dx.doi.org/10.3390/ma14164634
work_keys_str_mv AT bikaixi reliablefabricationofgraphenenanostructurebasedonebeamirradiationofpmmacoppercompositestructure
AT mujiliang reliablefabricationofgraphenenanostructurebasedonebeamirradiationofpmmacoppercompositestructure
AT gengwenping reliablefabricationofgraphenenanostructurebasedonebeamirradiationofpmmacoppercompositestructure
AT meilinyu reliablefabricationofgraphenenanostructurebasedonebeamirradiationofpmmacoppercompositestructure
AT zhousiyuan reliablefabricationofgraphenenanostructurebasedonebeamirradiationofpmmacoppercompositestructure
AT niuyaokai reliablefabricationofgraphenenanostructurebasedonebeamirradiationofpmmacoppercompositestructure
AT fuwenxiao reliablefabricationofgraphenenanostructurebasedonebeamirradiationofpmmacoppercompositestructure
AT tanligang reliablefabricationofgraphenenanostructurebasedonebeamirradiationofpmmacoppercompositestructure
AT hanshuqi reliablefabricationofgraphenenanostructurebasedonebeamirradiationofpmmacoppercompositestructure
AT chouxiujian reliablefabricationofgraphenenanostructurebasedonebeamirradiationofpmmacoppercompositestructure