The Effect of Annealing Temperatures on Selected Properties of WC/C Coatings, Deposited Using Hexacarbonyl Wolfram in an N(2)-SiH(4) Atmosphere

In this paper, we present the results of an experimental study on WC/C coatings, deposited by using plasma-enhanced chemical vapor deposition in an N(2)-SiH(4) atmosphere, annealed at temperatures of 200, 500 and 800 °C, in which the hexacarbonyl of W was used as a precursor. During the experiments,...

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Detalles Bibliográficos
Autores principales: Horňák, Peter, Kottfer, Daniel, Kyzioł, Karol, Trebuňová, Marianna, Kaňuchová, Mária, Kaczmarek, Lukasz, Jasenák, Jozef, Hašuľ, Ján, Rusinko, Lukáš
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8401557/
https://www.ncbi.nlm.nih.gov/pubmed/34443181
http://dx.doi.org/10.3390/ma14164658
Descripción
Sumario:In this paper, we present the results of an experimental study on WC/C coatings, deposited by using plasma-enhanced chemical vapor deposition in an N(2)-SiH(4) atmosphere, annealed at temperatures of 200, 500 and 800 °C, in which the hexacarbonyl of W was used as a precursor. During the experiments, the topography, chemical composition, morphology, as well as selected mechanical properties, such as hardness, Young’s modulus, and coefficient of friction of the WC/C coatings were analyzed. Annealing without the protective atmosphere in the mentioned temperatures caused a decrease in hardness (up to 15 ± 2.7 GPa). In addition, the coefficient of friction value increased only to 0.37 ± 0.03.

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