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Surface Roughness Tuning at Sub-Nanometer Level by Considering the Normal Stress Field in Magnetorheological Finishing

Although magnetorheological finishing (MRF) is being widely utilized to achieve ultra-smooth optical surfaces, the mechanisms for obtaining such extremely low roughness after the MRF process are not fully understood, especially the impact of finishing stresses. Herein we carefully investigated the r...

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Detalles Bibliográficos
Autores principales: Li, Xiaoyuan, Li, Qikai, Ye, Zuoyan, Zhang, Yunfei, Ye, Minheng, Wang, Chao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8401561/
https://www.ncbi.nlm.nih.gov/pubmed/34442618
http://dx.doi.org/10.3390/mi12080997
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author Li, Xiaoyuan
Li, Qikai
Ye, Zuoyan
Zhang, Yunfei
Ye, Minheng
Wang, Chao
author_facet Li, Xiaoyuan
Li, Qikai
Ye, Zuoyan
Zhang, Yunfei
Ye, Minheng
Wang, Chao
author_sort Li, Xiaoyuan
collection PubMed
description Although magnetorheological finishing (MRF) is being widely utilized to achieve ultra-smooth optical surfaces, the mechanisms for obtaining such extremely low roughness after the MRF process are not fully understood, especially the impact of finishing stresses. Herein we carefully investigated the relationship between the stresses and surface roughness. Normal stress shows stronger impacts on the surface roughness of fused silica (FS) when compared with the shear stress. In addition, normal stress in the polishing zone was found to be sensitive to the immersion depth of the magnetorheological (MR) fluid. Based on the above, a fine tuning of surface roughness (RMS: 0.22 nm) was obtained. This work fills gaps in understanding about the stresses that influence surface roughness during MRF.
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spelling pubmed-84015612021-08-29 Surface Roughness Tuning at Sub-Nanometer Level by Considering the Normal Stress Field in Magnetorheological Finishing Li, Xiaoyuan Li, Qikai Ye, Zuoyan Zhang, Yunfei Ye, Minheng Wang, Chao Micromachines (Basel) Communication Although magnetorheological finishing (MRF) is being widely utilized to achieve ultra-smooth optical surfaces, the mechanisms for obtaining such extremely low roughness after the MRF process are not fully understood, especially the impact of finishing stresses. Herein we carefully investigated the relationship between the stresses and surface roughness. Normal stress shows stronger impacts on the surface roughness of fused silica (FS) when compared with the shear stress. In addition, normal stress in the polishing zone was found to be sensitive to the immersion depth of the magnetorheological (MR) fluid. Based on the above, a fine tuning of surface roughness (RMS: 0.22 nm) was obtained. This work fills gaps in understanding about the stresses that influence surface roughness during MRF. MDPI 2021-08-21 /pmc/articles/PMC8401561/ /pubmed/34442618 http://dx.doi.org/10.3390/mi12080997 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Communication
Li, Xiaoyuan
Li, Qikai
Ye, Zuoyan
Zhang, Yunfei
Ye, Minheng
Wang, Chao
Surface Roughness Tuning at Sub-Nanometer Level by Considering the Normal Stress Field in Magnetorheological Finishing
title Surface Roughness Tuning at Sub-Nanometer Level by Considering the Normal Stress Field in Magnetorheological Finishing
title_full Surface Roughness Tuning at Sub-Nanometer Level by Considering the Normal Stress Field in Magnetorheological Finishing
title_fullStr Surface Roughness Tuning at Sub-Nanometer Level by Considering the Normal Stress Field in Magnetorheological Finishing
title_full_unstemmed Surface Roughness Tuning at Sub-Nanometer Level by Considering the Normal Stress Field in Magnetorheological Finishing
title_short Surface Roughness Tuning at Sub-Nanometer Level by Considering the Normal Stress Field in Magnetorheological Finishing
title_sort surface roughness tuning at sub-nanometer level by considering the normal stress field in magnetorheological finishing
topic Communication
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8401561/
https://www.ncbi.nlm.nih.gov/pubmed/34442618
http://dx.doi.org/10.3390/mi12080997
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