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Analysis of Optical Diffraction Profiles Created by Phase-Modulating MEMS Micromirror Arrays

This paper presents modeling and analysis of light diffraction and light-intensity modulation performed by an optical phased array (OPA) system based on metal-coated silicon micromirrors. The models can be used in the design process of a microelectromechanical system (MEMS)-based OPA device to predi...

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Detalles Bibliográficos
Autores principales:	Mohammad, Tarek, He, Siyuan, Mrad, Ridha Ben
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8401841/ https://www.ncbi.nlm.nih.gov/pubmed/34442511 http://dx.doi.org/10.3390/mi12080891

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