A Miniaturised, Fully Integrated NDIR CO(2) Sensor On-Chip

In this paper, we present a fully integrated Non-dispersive Infrared (NDIR) CO(2) sensor implemented on a silicon chip. The sensor is based on an integrating cylinder with access waveguides. A mid-IR LED is used as the optical source, and two mid-IR photodiodes are used as detectors. The fully integ...

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Detalles Bibliográficos
Autores principales: Jia, Xiaoning, Roels, Joris, Baets, Roel, Roelkens, Gunther
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8402227/
https://www.ncbi.nlm.nih.gov/pubmed/34450789
http://dx.doi.org/10.3390/s21165347

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