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Analysis of Tilt Effect on Notch Depth Profiling Using Thin-Skin Regime of Driver-Pickup Eddy-Current Sensor
Electromagnetic eddy current sensors are commonly used to identify and quantify the surface notches of metals. However, the unintentional tilt of eddy current sensors affects results of size profiling, particularly for the depth profiling. In this paper, based on the eddy current thin-skin regime, a...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8402255/ https://www.ncbi.nlm.nih.gov/pubmed/34450979 http://dx.doi.org/10.3390/s21165536 |
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author | Lu, Mingyang Meng, Xiaobai Huang, Ruochen Peyton, Anthony Yin, Wuliang |
author_facet | Lu, Mingyang Meng, Xiaobai Huang, Ruochen Peyton, Anthony Yin, Wuliang |
author_sort | Lu, Mingyang |
collection | PubMed |
description | Electromagnetic eddy current sensors are commonly used to identify and quantify the surface notches of metals. However, the unintentional tilt of eddy current sensors affects results of size profiling, particularly for the depth profiling. In this paper, based on the eddy current thin-skin regime, a revised algorithm has been proposed for the analytical voltage or impedance of a tilted driver–pickup eddy current sensor scanning across a long ideal notch. Considering the resolution of the measurement, the bespoke driver–pickup, also termed as transmitter–receiver (T-R) sensor is designed with a small mean radius of 1 mm. In addition, the T-R sensor is connected to the electromagnetic instrument and controlled by a scanning stage with high spatial travel resolution, with a limit of 0.2 μm and selected as 0.25 mm. Experiments were conducted for imaging of an aluminium sheet with seven machined long notches of different depths using T-R sensor under different tilt angles. By fitting the measured voltage (both real and imaginary part) with proposed analytical algorithms, the depth profiling of notches is less affected by the tilt angle of sensors. From the results, the depth of notches can be retrieved within a deviation of 10% for tilt angles up to 60 degrees. |
format | Online Article Text |
id | pubmed-8402255 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2021 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-84022552021-08-29 Analysis of Tilt Effect on Notch Depth Profiling Using Thin-Skin Regime of Driver-Pickup Eddy-Current Sensor Lu, Mingyang Meng, Xiaobai Huang, Ruochen Peyton, Anthony Yin, Wuliang Sensors (Basel) Article Electromagnetic eddy current sensors are commonly used to identify and quantify the surface notches of metals. However, the unintentional tilt of eddy current sensors affects results of size profiling, particularly for the depth profiling. In this paper, based on the eddy current thin-skin regime, a revised algorithm has been proposed for the analytical voltage or impedance of a tilted driver–pickup eddy current sensor scanning across a long ideal notch. Considering the resolution of the measurement, the bespoke driver–pickup, also termed as transmitter–receiver (T-R) sensor is designed with a small mean radius of 1 mm. In addition, the T-R sensor is connected to the electromagnetic instrument and controlled by a scanning stage with high spatial travel resolution, with a limit of 0.2 μm and selected as 0.25 mm. Experiments were conducted for imaging of an aluminium sheet with seven machined long notches of different depths using T-R sensor under different tilt angles. By fitting the measured voltage (both real and imaginary part) with proposed analytical algorithms, the depth profiling of notches is less affected by the tilt angle of sensors. From the results, the depth of notches can be retrieved within a deviation of 10% for tilt angles up to 60 degrees. MDPI 2021-08-17 /pmc/articles/PMC8402255/ /pubmed/34450979 http://dx.doi.org/10.3390/s21165536 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Lu, Mingyang Meng, Xiaobai Huang, Ruochen Peyton, Anthony Yin, Wuliang Analysis of Tilt Effect on Notch Depth Profiling Using Thin-Skin Regime of Driver-Pickup Eddy-Current Sensor |
title | Analysis of Tilt Effect on Notch Depth Profiling Using Thin-Skin Regime of Driver-Pickup Eddy-Current Sensor |
title_full | Analysis of Tilt Effect on Notch Depth Profiling Using Thin-Skin Regime of Driver-Pickup Eddy-Current Sensor |
title_fullStr | Analysis of Tilt Effect on Notch Depth Profiling Using Thin-Skin Regime of Driver-Pickup Eddy-Current Sensor |
title_full_unstemmed | Analysis of Tilt Effect on Notch Depth Profiling Using Thin-Skin Regime of Driver-Pickup Eddy-Current Sensor |
title_short | Analysis of Tilt Effect on Notch Depth Profiling Using Thin-Skin Regime of Driver-Pickup Eddy-Current Sensor |
title_sort | analysis of tilt effect on notch depth profiling using thin-skin regime of driver-pickup eddy-current sensor |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8402255/ https://www.ncbi.nlm.nih.gov/pubmed/34450979 http://dx.doi.org/10.3390/s21165536 |
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