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Off-axis multilayer zone plate with 16 nm × 28 nm focus for high-resolution X-ray beam induced current imaging

Using multilayer zone plates (MZPs) as two-dimensional optics, focal spot sizes of less than 10 nm can be achieved, as we show here with a focus of 8.4 nm × 9.6 nm, but the need for order-sorting apertures prohibits practical working distances. To overcome this issue, here an off-axis illumination o...

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Detalles Bibliográficos
Autores principales: Soltau, Jakob, Chayanun, Lert, Lyubomirskiy, Mikhail, Wallentin, Jesper, Osterhoff, Markus
Formato: Online Artículo Texto
Lenguaje:English
Publicado: International Union of Crystallography 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8415331/
https://www.ncbi.nlm.nih.gov/pubmed/34475304
http://dx.doi.org/10.1107/S1600577521006159

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