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Hard X-ray nanoprobe scanner

X-ray scientists are continually striving to improve the quality of X-ray microscopy, due to the fact that the information obtained from X-ray microscopy of materials can be complementary to that obtained from optical and electron microscopes. In contrast to the ease with which one can deflect elect...

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Autores principales: Yamada, Jumpei, Inoue, Ichiro, Osaka, Taito, Inoue, Takato, Matsuyama, Satoshi, Yamauchi, Kazuto, Yabashi, Makina
Formato: Online Artículo Texto
Lenguaje:English
Publicado: International Union of Crystallography 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8420768/
https://www.ncbi.nlm.nih.gov/pubmed/34584733
http://dx.doi.org/10.1107/S2052252521007004
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author Yamada, Jumpei
Inoue, Ichiro
Osaka, Taito
Inoue, Takato
Matsuyama, Satoshi
Yamauchi, Kazuto
Yabashi, Makina
author_facet Yamada, Jumpei
Inoue, Ichiro
Osaka, Taito
Inoue, Takato
Matsuyama, Satoshi
Yamauchi, Kazuto
Yabashi, Makina
author_sort Yamada, Jumpei
collection PubMed
description X-ray scientists are continually striving to improve the quality of X-ray microscopy, due to the fact that the information obtained from X-ray microscopy of materials can be complementary to that obtained from optical and electron microscopes. In contrast to the ease with which one can deflect electron beams, the relative difficulty to deflect X-ray has constrained the development of scanning X-ray microscopes (SXMs) based on a scan of an X-ray small probe. This restriction has caused severe complications that hinder progress toward achieving ultimate resolution. Here, a simple and innovative method for constructing an SXM equipped with a nanoprobe scanner is proposed. The nanoprobe scanner combines X-ray prisms and advanced Kirkpatrick–Baez focusing mirrors. By rotating the prisms on the order of degrees, X-ray probe scanning with single-nanometre accuracy can be easily achieved. The validity of the concept was verified by acquiring an SXM image of a test pattern at a photon energy of 10 keV, where 50 nm line-and-space structures were resolved. This method is readily applicable to an SXM with a single-nanometre resolution and will assist effective utilization of increasing brightness of fourth-generation synchrotron radiation sources.
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spelling pubmed-84207682021-09-27 Hard X-ray nanoprobe scanner Yamada, Jumpei Inoue, Ichiro Osaka, Taito Inoue, Takato Matsuyama, Satoshi Yamauchi, Kazuto Yabashi, Makina IUCrJ Research Letters X-ray scientists are continually striving to improve the quality of X-ray microscopy, due to the fact that the information obtained from X-ray microscopy of materials can be complementary to that obtained from optical and electron microscopes. In contrast to the ease with which one can deflect electron beams, the relative difficulty to deflect X-ray has constrained the development of scanning X-ray microscopes (SXMs) based on a scan of an X-ray small probe. This restriction has caused severe complications that hinder progress toward achieving ultimate resolution. Here, a simple and innovative method for constructing an SXM equipped with a nanoprobe scanner is proposed. The nanoprobe scanner combines X-ray prisms and advanced Kirkpatrick–Baez focusing mirrors. By rotating the prisms on the order of degrees, X-ray probe scanning with single-nanometre accuracy can be easily achieved. The validity of the concept was verified by acquiring an SXM image of a test pattern at a photon energy of 10 keV, where 50 nm line-and-space structures were resolved. This method is readily applicable to an SXM with a single-nanometre resolution and will assist effective utilization of increasing brightness of fourth-generation synchrotron radiation sources. International Union of Crystallography 2021-07-31 /pmc/articles/PMC8420768/ /pubmed/34584733 http://dx.doi.org/10.1107/S2052252521007004 Text en © Jumpei Yamada et al. 2021 https://creativecommons.org/licenses/by/4.0/This is an open-access article distributed under the terms of the Creative Commons Attribution (CC-BY) Licence, which permits unrestricted use, distribution, and reproduction in any medium, provided the original authors and source are cited.
spellingShingle Research Letters
Yamada, Jumpei
Inoue, Ichiro
Osaka, Taito
Inoue, Takato
Matsuyama, Satoshi
Yamauchi, Kazuto
Yabashi, Makina
Hard X-ray nanoprobe scanner
title Hard X-ray nanoprobe scanner
title_full Hard X-ray nanoprobe scanner
title_fullStr Hard X-ray nanoprobe scanner
title_full_unstemmed Hard X-ray nanoprobe scanner
title_short Hard X-ray nanoprobe scanner
title_sort hard x-ray nanoprobe scanner
topic Research Letters
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8420768/
https://www.ncbi.nlm.nih.gov/pubmed/34584733
http://dx.doi.org/10.1107/S2052252521007004
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