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Hard X-ray nanoprobe scanner
X-ray scientists are continually striving to improve the quality of X-ray microscopy, due to the fact that the information obtained from X-ray microscopy of materials can be complementary to that obtained from optical and electron microscopes. In contrast to the ease with which one can deflect elect...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
International Union of Crystallography
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8420768/ https://www.ncbi.nlm.nih.gov/pubmed/34584733 http://dx.doi.org/10.1107/S2052252521007004 |
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author | Yamada, Jumpei Inoue, Ichiro Osaka, Taito Inoue, Takato Matsuyama, Satoshi Yamauchi, Kazuto Yabashi, Makina |
author_facet | Yamada, Jumpei Inoue, Ichiro Osaka, Taito Inoue, Takato Matsuyama, Satoshi Yamauchi, Kazuto Yabashi, Makina |
author_sort | Yamada, Jumpei |
collection | PubMed |
description | X-ray scientists are continually striving to improve the quality of X-ray microscopy, due to the fact that the information obtained from X-ray microscopy of materials can be complementary to that obtained from optical and electron microscopes. In contrast to the ease with which one can deflect electron beams, the relative difficulty to deflect X-ray has constrained the development of scanning X-ray microscopes (SXMs) based on a scan of an X-ray small probe. This restriction has caused severe complications that hinder progress toward achieving ultimate resolution. Here, a simple and innovative method for constructing an SXM equipped with a nanoprobe scanner is proposed. The nanoprobe scanner combines X-ray prisms and advanced Kirkpatrick–Baez focusing mirrors. By rotating the prisms on the order of degrees, X-ray probe scanning with single-nanometre accuracy can be easily achieved. The validity of the concept was verified by acquiring an SXM image of a test pattern at a photon energy of 10 keV, where 50 nm line-and-space structures were resolved. This method is readily applicable to an SXM with a single-nanometre resolution and will assist effective utilization of increasing brightness of fourth-generation synchrotron radiation sources. |
format | Online Article Text |
id | pubmed-8420768 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2021 |
publisher | International Union of Crystallography |
record_format | MEDLINE/PubMed |
spelling | pubmed-84207682021-09-27 Hard X-ray nanoprobe scanner Yamada, Jumpei Inoue, Ichiro Osaka, Taito Inoue, Takato Matsuyama, Satoshi Yamauchi, Kazuto Yabashi, Makina IUCrJ Research Letters X-ray scientists are continually striving to improve the quality of X-ray microscopy, due to the fact that the information obtained from X-ray microscopy of materials can be complementary to that obtained from optical and electron microscopes. In contrast to the ease with which one can deflect electron beams, the relative difficulty to deflect X-ray has constrained the development of scanning X-ray microscopes (SXMs) based on a scan of an X-ray small probe. This restriction has caused severe complications that hinder progress toward achieving ultimate resolution. Here, a simple and innovative method for constructing an SXM equipped with a nanoprobe scanner is proposed. The nanoprobe scanner combines X-ray prisms and advanced Kirkpatrick–Baez focusing mirrors. By rotating the prisms on the order of degrees, X-ray probe scanning with single-nanometre accuracy can be easily achieved. The validity of the concept was verified by acquiring an SXM image of a test pattern at a photon energy of 10 keV, where 50 nm line-and-space structures were resolved. This method is readily applicable to an SXM with a single-nanometre resolution and will assist effective utilization of increasing brightness of fourth-generation synchrotron radiation sources. International Union of Crystallography 2021-07-31 /pmc/articles/PMC8420768/ /pubmed/34584733 http://dx.doi.org/10.1107/S2052252521007004 Text en © Jumpei Yamada et al. 2021 https://creativecommons.org/licenses/by/4.0/This is an open-access article distributed under the terms of the Creative Commons Attribution (CC-BY) Licence, which permits unrestricted use, distribution, and reproduction in any medium, provided the original authors and source are cited. |
spellingShingle | Research Letters Yamada, Jumpei Inoue, Ichiro Osaka, Taito Inoue, Takato Matsuyama, Satoshi Yamauchi, Kazuto Yabashi, Makina Hard X-ray nanoprobe scanner |
title | Hard X-ray nanoprobe scanner |
title_full | Hard X-ray nanoprobe scanner |
title_fullStr | Hard X-ray nanoprobe scanner |
title_full_unstemmed | Hard X-ray nanoprobe scanner |
title_short | Hard X-ray nanoprobe scanner |
title_sort | hard x-ray nanoprobe scanner |
topic | Research Letters |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8420768/ https://www.ncbi.nlm.nih.gov/pubmed/34584733 http://dx.doi.org/10.1107/S2052252521007004 |
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