Super fine cerium hydroxide abrasives for SiO(2) film chemical mechanical planarization performing scratch free

Face-centered-cubic crystallized super-fine (~ 2 nm in size) wet-ceria-abrasives are synthesized using a novel wet precipitation process that comprises a Ce(4+) precursor, C(3)H(4)N(2) catalyst, and NaOH titrant for a synthesized termination process at temperature of at temperature of 25 °C. This pr...

Descripción completa

Detalles Bibliográficos
Autores principales: Son, Young-Hye, Jeong, Gi-Ppeum, Kim, Pil-Su, Han, Man-Hyup, Hong, Seong-Wan, Bae, Jae-Young, Kim, Sung-In, Park, Jin-Hyung, Park, Jea-Gun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8421349/
https://www.ncbi.nlm.nih.gov/pubmed/34489499
http://dx.doi.org/10.1038/s41598-021-97122-9

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8421349/
https://www.ncbi.nlm.nih.gov/pubmed/34489499
http://dx.doi.org/10.1038/s41598-021-97122-9

Ejemplares similares