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Super fine cerium hydroxide abrasives for SiO(2) film chemical mechanical planarization performing scratch free
Face-centered-cubic crystallized super-fine (~ 2 nm in size) wet-ceria-abrasives are synthesized using a novel wet precipitation process that comprises a Ce(4+) precursor, C(3)H(4)N(2) catalyst, and NaOH titrant for a synthesized termination process at temperature of at temperature of 25 °C. This pr...
| Autores principales: | , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8421349/ https://www.ncbi.nlm.nih.gov/pubmed/34489499 http://dx.doi.org/10.1038/s41598-021-97122-9 |