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Thermal scanning probe lithography—a review

Fundamental aspects and state-of-the-art results of thermal scanning probe lithography (t-SPL) are reviewed here. t-SPL is an emerging direct-write nanolithography method with many unique properties which enable original or improved nano-patterning in application fields ranging from quantum technolo...

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Detalles Bibliográficos
Autores principales: Howell, Samuel Tobias, Grushina, Anya, Holzner, Felix, Brugger, Juergen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433166/
https://www.ncbi.nlm.nih.gov/pubmed/34567636
http://dx.doi.org/10.1038/s41378-019-0124-8

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