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AlN MEMS filters with extremely high bandwidth widening capability
This paper presents radio frequency (RF) microelectromechanical system (MEMS) filters with extremely high bandwidth widening capability. The proposed filtering topologies include hybrid configurations consisting of piezoelectric MEMS resonators and surface-mounted lumped elements. The MEMS resonator...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433195/ https://www.ncbi.nlm.nih.gov/pubmed/34567684 http://dx.doi.org/10.1038/s41378-020-00183-5 |
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author | Gao, Anming Liu, Kangfu Liang, Junrui Wu, Tao |
author_facet | Gao, Anming Liu, Kangfu Liang, Junrui Wu, Tao |
author_sort | Gao, Anming |
collection | PubMed |
description | This paper presents radio frequency (RF) microelectromechanical system (MEMS) filters with extremely high bandwidth widening capability. The proposed filtering topologies include hybrid configurations consisting of piezoelectric MEMS resonators and surface-mounted lumped elements. The MEMS resonators set the center frequency and provide electromechanical coupling to construct the filters, while the lumped-element-based matching networks help widen the bandwidth (BW) and enhance the out-of-band rejection. Aluminum nitride (AlN) S0 Lamb wave resonators are then applied to the proposed filtering topologies. AlN S0 first- and second-order wideband filters are studied and have shown prominent performance. Finally, the AlN S0 first-order wideband filter is experimentally implemented and characterized. The demonstrated first-order filter shows a large fractional bandwidth (FBW) of 5.6% (achieved with a resonator coupling of 0.94%) and a low insertion loss (IL) of 1.84 dB. The extracted bandwidth widening factor (BWF) is 6, which is approximately 12 times higher than those of the current ladder or lattice filtering topologies. This impressive bandwidth widening capability holds great potential for satisfying the stringent BW requirements of bands n77, n78, and n79 of 5G new radio (NR) and will overcome an outstanding technology hurdle in placing 5G NR into the marketplace. |
format | Online Article Text |
id | pubmed-8433195 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2020 |
publisher | Nature Publishing Group UK |
record_format | MEDLINE/PubMed |
spelling | pubmed-84331952021-09-24 AlN MEMS filters with extremely high bandwidth widening capability Gao, Anming Liu, Kangfu Liang, Junrui Wu, Tao Microsyst Nanoeng Article This paper presents radio frequency (RF) microelectromechanical system (MEMS) filters with extremely high bandwidth widening capability. The proposed filtering topologies include hybrid configurations consisting of piezoelectric MEMS resonators and surface-mounted lumped elements. The MEMS resonators set the center frequency and provide electromechanical coupling to construct the filters, while the lumped-element-based matching networks help widen the bandwidth (BW) and enhance the out-of-band rejection. Aluminum nitride (AlN) S0 Lamb wave resonators are then applied to the proposed filtering topologies. AlN S0 first- and second-order wideband filters are studied and have shown prominent performance. Finally, the AlN S0 first-order wideband filter is experimentally implemented and characterized. The demonstrated first-order filter shows a large fractional bandwidth (FBW) of 5.6% (achieved with a resonator coupling of 0.94%) and a low insertion loss (IL) of 1.84 dB. The extracted bandwidth widening factor (BWF) is 6, which is approximately 12 times higher than those of the current ladder or lattice filtering topologies. This impressive bandwidth widening capability holds great potential for satisfying the stringent BW requirements of bands n77, n78, and n79 of 5G new radio (NR) and will overcome an outstanding technology hurdle in placing 5G NR into the marketplace. Nature Publishing Group UK 2020-09-07 /pmc/articles/PMC8433195/ /pubmed/34567684 http://dx.doi.org/10.1038/s41378-020-00183-5 Text en © The Author(s) 2020 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) . |
spellingShingle | Article Gao, Anming Liu, Kangfu Liang, Junrui Wu, Tao AlN MEMS filters with extremely high bandwidth widening capability |
title | AlN MEMS filters with extremely high bandwidth widening capability |
title_full | AlN MEMS filters with extremely high bandwidth widening capability |
title_fullStr | AlN MEMS filters with extremely high bandwidth widening capability |
title_full_unstemmed | AlN MEMS filters with extremely high bandwidth widening capability |
title_short | AlN MEMS filters with extremely high bandwidth widening capability |
title_sort | aln mems filters with extremely high bandwidth widening capability |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433195/ https://www.ncbi.nlm.nih.gov/pubmed/34567684 http://dx.doi.org/10.1038/s41378-020-00183-5 |
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