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AlN MEMS filters with extremely high bandwidth widening capability

This paper presents radio frequency (RF) microelectromechanical system (MEMS) filters with extremely high bandwidth widening capability. The proposed filtering topologies include hybrid configurations consisting of piezoelectric MEMS resonators and surface-mounted lumped elements. The MEMS resonator...

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Detalles Bibliográficos
Autores principales: Gao, Anming, Liu, Kangfu, Liang, Junrui, Wu, Tao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433195/
https://www.ncbi.nlm.nih.gov/pubmed/34567684
http://dx.doi.org/10.1038/s41378-020-00183-5
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author Gao, Anming
Liu, Kangfu
Liang, Junrui
Wu, Tao
author_facet Gao, Anming
Liu, Kangfu
Liang, Junrui
Wu, Tao
author_sort Gao, Anming
collection PubMed
description This paper presents radio frequency (RF) microelectromechanical system (MEMS) filters with extremely high bandwidth widening capability. The proposed filtering topologies include hybrid configurations consisting of piezoelectric MEMS resonators and surface-mounted lumped elements. The MEMS resonators set the center frequency and provide electromechanical coupling to construct the filters, while the lumped-element-based matching networks help widen the bandwidth (BW) and enhance the out-of-band rejection. Aluminum nitride (AlN) S0 Lamb wave resonators are then applied to the proposed filtering topologies. AlN S0 first- and second-order wideband filters are studied and have shown prominent performance. Finally, the AlN S0 first-order wideband filter is experimentally implemented and characterized. The demonstrated first-order filter shows a large fractional bandwidth (FBW) of 5.6% (achieved with a resonator coupling of 0.94%) and a low insertion loss (IL) of 1.84 dB. The extracted bandwidth widening factor (BWF) is 6, which is approximately 12 times higher than those of the current ladder or lattice filtering topologies. This impressive bandwidth widening capability holds great potential for satisfying the stringent BW requirements of bands n77, n78, and n79 of 5G new radio (NR) and will overcome an outstanding technology hurdle in placing 5G NR into the marketplace.
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spelling pubmed-84331952021-09-24 AlN MEMS filters with extremely high bandwidth widening capability Gao, Anming Liu, Kangfu Liang, Junrui Wu, Tao Microsyst Nanoeng Article This paper presents radio frequency (RF) microelectromechanical system (MEMS) filters with extremely high bandwidth widening capability. The proposed filtering topologies include hybrid configurations consisting of piezoelectric MEMS resonators and surface-mounted lumped elements. The MEMS resonators set the center frequency and provide electromechanical coupling to construct the filters, while the lumped-element-based matching networks help widen the bandwidth (BW) and enhance the out-of-band rejection. Aluminum nitride (AlN) S0 Lamb wave resonators are then applied to the proposed filtering topologies. AlN S0 first- and second-order wideband filters are studied and have shown prominent performance. Finally, the AlN S0 first-order wideband filter is experimentally implemented and characterized. The demonstrated first-order filter shows a large fractional bandwidth (FBW) of 5.6% (achieved with a resonator coupling of 0.94%) and a low insertion loss (IL) of 1.84 dB. The extracted bandwidth widening factor (BWF) is 6, which is approximately 12 times higher than those of the current ladder or lattice filtering topologies. This impressive bandwidth widening capability holds great potential for satisfying the stringent BW requirements of bands n77, n78, and n79 of 5G new radio (NR) and will overcome an outstanding technology hurdle in placing 5G NR into the marketplace. Nature Publishing Group UK 2020-09-07 /pmc/articles/PMC8433195/ /pubmed/34567684 http://dx.doi.org/10.1038/s41378-020-00183-5 Text en © The Author(s) 2020 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) .
spellingShingle Article
Gao, Anming
Liu, Kangfu
Liang, Junrui
Wu, Tao
AlN MEMS filters with extremely high bandwidth widening capability
title AlN MEMS filters with extremely high bandwidth widening capability
title_full AlN MEMS filters with extremely high bandwidth widening capability
title_fullStr AlN MEMS filters with extremely high bandwidth widening capability
title_full_unstemmed AlN MEMS filters with extremely high bandwidth widening capability
title_short AlN MEMS filters with extremely high bandwidth widening capability
title_sort aln mems filters with extremely high bandwidth widening capability
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433195/
https://www.ncbi.nlm.nih.gov/pubmed/34567684
http://dx.doi.org/10.1038/s41378-020-00183-5
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