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AlN MEMS filters with extremely high bandwidth widening capability

This paper presents radio frequency (RF) microelectromechanical system (MEMS) filters with extremely high bandwidth widening capability. The proposed filtering topologies include hybrid configurations consisting of piezoelectric MEMS resonators and surface-mounted lumped elements. The MEMS resonator...

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Detalles Bibliográficos
Autores principales:	Gao, Anming, Liu, Kangfu, Liang, Junrui, Wu, Tao
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433195/ https://www.ncbi.nlm.nih.gov/pubmed/34567684 http://dx.doi.org/10.1038/s41378-020-00183-5

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