High-resolution MEMS inertial sensor combining large-displacement buckling behaviour with integrated capacitive readout

Commercially available gravimeters and seismometers can be used for measuring Earth’s acceleration at resolution levels in the order of [Formula: see text] (where g represents earth’s gravity) but they are typically high-cost and bulky. In this work the design of a bulk micromachined MEMS device exp...

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Detalles Bibliográficos
Autores principales: El Mansouri, Brahim, Middelburg, Luke M., Poelma, René H., Zhang, Guo Qi, van Zeijl, Henk W., Wei, Jia, Jiang, Hui, Vogel, Johan G., van Driel, Willem D.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433333/
https://www.ncbi.nlm.nih.gov/pubmed/34567613
http://dx.doi.org/10.1038/s41378-019-0105-y

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433333/
https://www.ncbi.nlm.nih.gov/pubmed/34567613
http://dx.doi.org/10.1038/s41378-019-0105-y

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