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High-resolution MEMS inertial sensor combining large-displacement buckling behaviour with integrated capacitive readout
Commercially available gravimeters and seismometers can be used for measuring Earth’s acceleration at resolution levels in the order of [Formula: see text] (where g represents earth’s gravity) but they are typically high-cost and bulky. In this work the design of a bulk micromachined MEMS device exp...
| Autores principales: | , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433333/ https://www.ncbi.nlm.nih.gov/pubmed/34567613 http://dx.doi.org/10.1038/s41378-019-0105-y |