Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithm

This paper describes a novel, semiautomated design methodology based on a genetic algorithm (GA) using freeform geometries for microelectromechanical systems (MEMS) devices. The proposed method can design MEMS devices comprising freeform geometries and optimize such MEMS devices to provide high sens...

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Detalles Bibliográficos
Autores principales: Wang, Chen, Song, Xiaoxiao, Fang, Weidong, Chen, Fang, Zeimpekis, Ioannis, Wang, Yuan, Quan, Aojie, Bai, Jian, Liu, Huafeng, Schropfer, Gerold, Welham, Chris, Kraft, Michael
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433402/
https://www.ncbi.nlm.nih.gov/pubmed/34567713
http://dx.doi.org/10.1038/s41378-020-00214-1

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