Low motional impedance distributed Lamé mode resonators for high frequency timing applications

This paper presents a novel high-Q silicon distributed Lamé mode resonator (DLR) for VHF timing reference applications. The DLR employs the nature of shear wave propagation to enable a cascade of small square Lamé modes in beam or frame configurations with increased transduction area. Combined with...

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Detalles Bibliográficos
Autores principales: Daruwalla, Anosh, Wen, Haoran, Liu, Chang-Shun, Ayazi, Farrokh
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433430/
https://www.ncbi.nlm.nih.gov/pubmed/34567664
http://dx.doi.org/10.1038/s41378-020-0157-z

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433430/
https://www.ncbi.nlm.nih.gov/pubmed/34567664
http://dx.doi.org/10.1038/s41378-020-0157-z

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