Cargando…
“Top-down” and “bottom-up” strategies for wafer-scaled miniaturized gas sensors design and fabrication
Manufacture of large-scale patterned nanomaterials via top-down techniques, such as printing and slurry coating, have been used for fabrication of miniaturized gas sensors. However, the reproducibility and uniformity of the sensors in wafer-scale fabrication are still a challenge. In this work, a “t...
Autores principales: | , , , , , , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2020
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433434/ https://www.ncbi.nlm.nih.gov/pubmed/34567645 http://dx.doi.org/10.1038/s41378-020-0144-4 |
_version_ | 1783751377706549248 |
---|---|
author | Liu, Lin Wang, Yingyi Sun, Fuqin Dai, Yanbing Wang, Shuqi Bai, Yuanyuan Li, Lianhui Li, Tie Zhang, Ting Qin, Sujie |
author_facet | Liu, Lin Wang, Yingyi Sun, Fuqin Dai, Yanbing Wang, Shuqi Bai, Yuanyuan Li, Lianhui Li, Tie Zhang, Ting Qin, Sujie |
author_sort | Liu, Lin |
collection | PubMed |
description | Manufacture of large-scale patterned nanomaterials via top-down techniques, such as printing and slurry coating, have been used for fabrication of miniaturized gas sensors. However, the reproducibility and uniformity of the sensors in wafer-scale fabrication are still a challenge. In this work, a “top-down” and “bottom-up” combined strategy was proposed to manufacture wafer-scaled miniaturized gas sensors with high-throughput by in-situ growth of Ni(OH)(2) nanowalls at specific locations. First, the micro-hotplate based sensor chips were fabricated on a two-inch (2”) silicon wafer by micro-electro-mechanical-system (MEMS) fabrication techniques (“top-down” strategy). Then a template-guided controllable de-wetting method was used to assemble a porous thermoplastic elastomer (TPE) thin film with uniform micro-sized holes (relative standard deviation (RSD) of the size of micro-holes <3.5 %, n > 300), which serves as the patterned mask for in-situ growing Ni(OH)(2) nanowalls at the micro-hole areas (“bottom-up” strategy). The obtained gas microsensors based on this strategy showed great reproducibility of electric properties (RSD < 0.8%, n = 8) and sensing response toward real-time H(2)S detection (RSD < 3.5%, n = 8). |
format | Online Article Text |
id | pubmed-8433434 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2020 |
publisher | Nature Publishing Group UK |
record_format | MEDLINE/PubMed |
spelling | pubmed-84334342021-09-24 “Top-down” and “bottom-up” strategies for wafer-scaled miniaturized gas sensors design and fabrication Liu, Lin Wang, Yingyi Sun, Fuqin Dai, Yanbing Wang, Shuqi Bai, Yuanyuan Li, Lianhui Li, Tie Zhang, Ting Qin, Sujie Microsyst Nanoeng Article Manufacture of large-scale patterned nanomaterials via top-down techniques, such as printing and slurry coating, have been used for fabrication of miniaturized gas sensors. However, the reproducibility and uniformity of the sensors in wafer-scale fabrication are still a challenge. In this work, a “top-down” and “bottom-up” combined strategy was proposed to manufacture wafer-scaled miniaturized gas sensors with high-throughput by in-situ growth of Ni(OH)(2) nanowalls at specific locations. First, the micro-hotplate based sensor chips were fabricated on a two-inch (2”) silicon wafer by micro-electro-mechanical-system (MEMS) fabrication techniques (“top-down” strategy). Then a template-guided controllable de-wetting method was used to assemble a porous thermoplastic elastomer (TPE) thin film with uniform micro-sized holes (relative standard deviation (RSD) of the size of micro-holes <3.5 %, n > 300), which serves as the patterned mask for in-situ growing Ni(OH)(2) nanowalls at the micro-hole areas (“bottom-up” strategy). The obtained gas microsensors based on this strategy showed great reproducibility of electric properties (RSD < 0.8%, n = 8) and sensing response toward real-time H(2)S detection (RSD < 3.5%, n = 8). Nature Publishing Group UK 2020-05-04 /pmc/articles/PMC8433434/ /pubmed/34567645 http://dx.doi.org/10.1038/s41378-020-0144-4 Text en © The Author(s) 2020 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) . |
spellingShingle | Article Liu, Lin Wang, Yingyi Sun, Fuqin Dai, Yanbing Wang, Shuqi Bai, Yuanyuan Li, Lianhui Li, Tie Zhang, Ting Qin, Sujie “Top-down” and “bottom-up” strategies for wafer-scaled miniaturized gas sensors design and fabrication |
title | “Top-down” and “bottom-up” strategies for wafer-scaled miniaturized gas sensors design and fabrication |
title_full | “Top-down” and “bottom-up” strategies for wafer-scaled miniaturized gas sensors design and fabrication |
title_fullStr | “Top-down” and “bottom-up” strategies for wafer-scaled miniaturized gas sensors design and fabrication |
title_full_unstemmed | “Top-down” and “bottom-up” strategies for wafer-scaled miniaturized gas sensors design and fabrication |
title_short | “Top-down” and “bottom-up” strategies for wafer-scaled miniaturized gas sensors design and fabrication |
title_sort | “top-down” and “bottom-up” strategies for wafer-scaled miniaturized gas sensors design and fabrication |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433434/ https://www.ncbi.nlm.nih.gov/pubmed/34567645 http://dx.doi.org/10.1038/s41378-020-0144-4 |
work_keys_str_mv | AT liulin topdownandbottomupstrategiesforwaferscaledminiaturizedgassensorsdesignandfabrication AT wangyingyi topdownandbottomupstrategiesforwaferscaledminiaturizedgassensorsdesignandfabrication AT sunfuqin topdownandbottomupstrategiesforwaferscaledminiaturizedgassensorsdesignandfabrication AT daiyanbing topdownandbottomupstrategiesforwaferscaledminiaturizedgassensorsdesignandfabrication AT wangshuqi topdownandbottomupstrategiesforwaferscaledminiaturizedgassensorsdesignandfabrication AT baiyuanyuan topdownandbottomupstrategiesforwaferscaledminiaturizedgassensorsdesignandfabrication AT lilianhui topdownandbottomupstrategiesforwaferscaledminiaturizedgassensorsdesignandfabrication AT litie topdownandbottomupstrategiesforwaferscaledminiaturizedgassensorsdesignandfabrication AT zhangting topdownandbottomupstrategiesforwaferscaledminiaturizedgassensorsdesignandfabrication AT qinsujie topdownandbottomupstrategiesforwaferscaledminiaturizedgassensorsdesignandfabrication |