“Top-down” and “bottom-up” strategies for wafer-scaled miniaturized gas sensors design and fabrication

Manufacture of large-scale patterned nanomaterials via top-down techniques, such as printing and slurry coating, have been used for fabrication of miniaturized gas sensors. However, the reproducibility and uniformity of the sensors in wafer-scale fabrication are still a challenge. In this work, a “t...

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Detalles Bibliográficos
Autores principales: Liu, Lin, Wang, Yingyi, Sun, Fuqin, Dai, Yanbing, Wang, Shuqi, Bai, Yuanyuan, Li, Lianhui, Li, Tie, Zhang, Ting, Qin, Sujie
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433434/
https://www.ncbi.nlm.nih.gov/pubmed/34567645
http://dx.doi.org/10.1038/s41378-020-0144-4

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