Sensitive capacitive pressure sensors based on graphene membrane arrays

The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors, the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial...

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Detalles Bibliográficos
Autores principales: Šiškins, Makars, Lee, Martin, Wehenkel, Dominique, van Rijn, Richard, de Jong, Tijmen W., Renshof, Johannes R., Hopman, Berend C., Peters, Willemijn S. J. M., Davidovikj, Dejan, van der Zant, Herre S. J., Steeneken, Peter G.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433463/
https://www.ncbi.nlm.nih.gov/pubmed/34567711
http://dx.doi.org/10.1038/s41378-020-00212-3

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