Development of the Heterodyne Laser Encoder System for the X–Y Positioning Stage

This investigation develops a laser encoder system based on a heterodyne laser interferometer. For eliminating geometric errors, the optical structure of the proposed encoder system was carried out with the internal zero-point method. The designed structure can eliminate the geometric errors, includ...

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Detalles Bibliográficos
Autores principales: Chang, Chung-Ping, Tu, Tsung-Chun, Huang, Siang-Ruei, Wang, Yung-Cheng, Chang, Syuan-Cheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433824/
https://www.ncbi.nlm.nih.gov/pubmed/34502666
http://dx.doi.org/10.3390/s21175775

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433824/
https://www.ncbi.nlm.nih.gov/pubmed/34502666
http://dx.doi.org/10.3390/s21175775

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