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Development of the Heterodyne Laser Encoder System for the X–Y Positioning Stage
This investigation develops a laser encoder system based on a heterodyne laser interferometer. For eliminating geometric errors, the optical structure of the proposed encoder system was carried out with the internal zero-point method. The designed structure can eliminate the geometric errors, includ...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8433824/ https://www.ncbi.nlm.nih.gov/pubmed/34502666 http://dx.doi.org/10.3390/s21175775 |