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Design and Fabrication of a Low-Cost Thermopile Infrared Detector
In this paper, we design and optimize a low-cost, closed-film structure of a microelectromechanical systems (MEMS) thermopile infrared detector. By optimizing the circular arrangement of thermocouple strips and the thermal isolation design of the cold end to pursue a higher temperature difference, i...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8464669/ https://www.ncbi.nlm.nih.gov/pubmed/34577777 http://dx.doi.org/10.3390/mi12091134 |
Sumario: | In this paper, we design and optimize a low-cost, closed-film structure of a microelectromechanical systems (MEMS) thermopile infrared detector. By optimizing the circular arrangement of thermocouple strips and the thermal isolation design of the cold end to pursue a higher temperature difference, in addition to eliminating the absorption region, silicon nitride is deposited on the whole device surface as a passivated absorption layer. This reduces the cost while maintaining the voltage response and is suitable for mass production. The optimized detector had a 22.6% improvement in the response rate to 34.2 V/W, a detection rate of 1.02 × 10(8) cm·Hz(1/2)/W, and a response time of 26.9 ms. The design optimization of this detector provides a reference for further development of IR detectors. |
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