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Design and Fabrication of a Low-Cost Thermopile Infrared Detector

In this paper, we design and optimize a low-cost, closed-film structure of a microelectromechanical systems (MEMS) thermopile infrared detector. By optimizing the circular arrangement of thermocouple strips and the thermal isolation design of the cold end to pursue a higher temperature difference, i...

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Detalles Bibliográficos
Autores principales:	Liang, Ting, Guan, Yihao, Lei, Cheng, Wu, Xuezhan, Bai, Yuehang, Xiong, Jijun, Qi, Lei
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8464669/ https://www.ncbi.nlm.nih.gov/pubmed/34577777 http://dx.doi.org/10.3390/mi12091134

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