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The Effect of Annealing Ambience on the Material and Photodetector Characteristics of Sputtered ZnGa(2)O(4) Films

Spinel ZnGa(2)O(4) films were grown on c-plane sapphire substrates at the substrate temperature of 400 °C by radio-frequency magnetron sputtering. Post thermal annealing was employed at the annealing temperature of 700 °C in order to enhance their crystal quality. The effect of thermal annealing on...

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Detalles Bibliográficos
Autores principales:	Singh, Anoop Kumar, Huang, Shiau-Yuan, Chen, Po-Wei, Chiang, Jung-Lung, Wuu, Dong-Sing
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8465956/ https://www.ncbi.nlm.nih.gov/pubmed/34578633 http://dx.doi.org/10.3390/nano11092316

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