Short-Pulse Laser-Assisted Fabrication of a Si-SiO(2) Microcooling Device

Thermal management is one of the main challenges in the most demanding detector technologies and for the future of microelectronics. Microfluidic cooling has been proposed as a fully integrated solution to the heat dissipation problem in modern high-power microelectronics. Traditional manufacturing...

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Detalles Bibliográficos
Autores principales: Mouskeftaras, Alexandros, Beurthey, Stephan, Cogan, Julien, Hallewell, Gregory, Leroy, Olivier, Grojo, David, Perrin-Terrin, Mathieu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8466599/
https://www.ncbi.nlm.nih.gov/pubmed/34577698
http://dx.doi.org/10.3390/mi12091054

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8466599/
https://www.ncbi.nlm.nih.gov/pubmed/34577698
http://dx.doi.org/10.3390/mi12091054

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