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Short-Pulse Laser-Assisted Fabrication of a Si-SiO(2) Microcooling Device

Thermal management is one of the main challenges in the most demanding detector technologies and for the future of microelectronics. Microfluidic cooling has been proposed as a fully integrated solution to the heat dissipation problem in modern high-power microelectronics. Traditional manufacturing...

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Detalles Bibliográficos
Autores principales:	Mouskeftaras, Alexandros, Beurthey, Stephan, Cogan, Julien, Hallewell, Gregory, Leroy, Olivier, Grojo, David, Perrin-Terrin, Mathieu
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8466599/ https://www.ncbi.nlm.nih.gov/pubmed/34577698 http://dx.doi.org/10.3390/mi12091054

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