An Improved Difference Temperature Compensation Method for MEMS Resonant Accelerometers

Resonant accelerometers are promising because of their wide dynamic range and long-term stability. With quasi-digital frequency output, the outputs of resonant accelerometers are less vulnerable to the noise from circuits and ambience. Differential structure is usually adopted in a resonant accelero...

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Detalles Bibliográficos
Autores principales: Cai, Pengcheng, Xiong, Xingyin, Wang, Kunfeng, Wang, Jiawei, Zou, Xudong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8466711/
https://www.ncbi.nlm.nih.gov/pubmed/34577666
http://dx.doi.org/10.3390/mi12091022

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8466711/
https://www.ncbi.nlm.nih.gov/pubmed/34577666
http://dx.doi.org/10.3390/mi12091022

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