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An Improved Difference Temperature Compensation Method for MEMS Resonant Accelerometers
Resonant accelerometers are promising because of their wide dynamic range and long-term stability. With quasi-digital frequency output, the outputs of resonant accelerometers are less vulnerable to the noise from circuits and ambience. Differential structure is usually adopted in a resonant accelero...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8466711/ https://www.ncbi.nlm.nih.gov/pubmed/34577666 http://dx.doi.org/10.3390/mi12091022 |