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Solidly Mounted Longitudinally Excited Shear Wave Resonator (YBAR) Based on Lithium Niobate Thin-Film

This paper proposed a solid-mounted (SM) longitudinally excited shear wave resonator (i.e., YBAR). By adopting a 200 nm x-cut LiNbO(3) film, top (aluminum) and bottom (platinum) electrodes in 50 nm thickness and 500 nm width, this resonator simultaneously achieves an operating frequency over 5 GHz w...

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Detalles Bibliográficos
Autores principales:	Qin, Zhen-Hui, Wu, Shu-Mao, Wang, Yong, Liu, Kang-Fu, Wu, Tao, Yu, Si-Yuan, Chen, Yan-Feng
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8467399/ https://www.ncbi.nlm.nih.gov/pubmed/34577683 http://dx.doi.org/10.3390/mi12091039

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