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Characterising a Custom-Built Radio Frequency PECVD Reactor to Vary the Mechanical Properties of TMDSO Films

Plasma-polymerised tetramethyldisiloxane (TMDSO) films are frequently applied as coatings for their abrasion resistance and barrier properties. By manipulating the deposition parameters, the chemical structure and thus mechanical properties of the films can also be controlled. These mechanical prope...

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Detalles Bibliográficos
Autores principales:	Radjef, Racim, Jarvis, Karyn L., Hall, Colin, Ang, Andrew, Fox, Bronwyn L., McArthur, Sally L.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8468313/ https://www.ncbi.nlm.nih.gov/pubmed/34577090 http://dx.doi.org/10.3390/molecules26185621

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