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Real-Time Built-In Self-Test of MEMS Gyroscope Based on Quadrature Error Signal

In high-reliability applications, the health condition of the MEMS gyroscope needs to be known in real time to ensure that the system does not fail due to the wrong output signal. Because the MEMS gyroscope self-test based on the principle of electrostatic force cannot be performed during the workin...

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Detalles Bibliográficos
Autores principales:	Feng, Rui, Wang, Jiong, Qiao, Wei, Wang, Fu, Zhou, Ming, Shang, Xinglian, Yu, Lei, Zhou, Liuhui, Guo, Shuwen
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8469003/ https://www.ncbi.nlm.nih.gov/pubmed/34577757 http://dx.doi.org/10.3390/mi12091115

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