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Investigation on Design Theory and Performance Analysis of Vacuum Capacitive Micromachined Ultrasonic Transducer

The capacitive micromachined ultrasonic transducer (CMUT), as a new acoustic-electric conversion element, has a promising application prospect. In this paper, the structure of the vacuum capacitive micromachined ultrasonic transducer is presented, and its performance-influencing factors are investig...

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Detalles Bibliográficos
Autores principales:	Huang, Xiao, Wang, Hongliang, Yu, Lijun
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8470439/ https://www.ncbi.nlm.nih.gov/pubmed/34577770 http://dx.doi.org/10.3390/mi12091127

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