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Error Analysis of the Combined-Scan High-Speed Atomic Force Microscopy

A combined tip-sample scanning architecture can improve the imaging speed of atomic force microscopy (AFM). However, the nonorthogonality between the three scanners and the nonideal response of each scanner cause measurement errors. In this article, the authors systematically analyze the influence o...

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Detalles Bibliográficos
Autores principales:	Liu, Lu, Kong, Ming, Wu, Sen, Xu, Xinke, Wang, Daodang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8471258/ https://www.ncbi.nlm.nih.gov/pubmed/34577346 http://dx.doi.org/10.3390/s21186139

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