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ZnO Thin Films Growth Optimization for Piezoelectric Application

The piezoelectric response of ZnO thin films in heterostructure-based devices is strictly related to their structure and morphology. We optimize the fabrication of piezoelectric ZnO to reduce its surface roughness, improving the crystalline quality, taking into consideration the role of the metal el...

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Detalles Bibliográficos
Autores principales:	Polewczyk, Vincent, Magrin Maffei, Riccardo, Vinai, Giovanni, Lo Cicero, Matteo, Prato, Stefano, Capaldo, Pietro, Dal Zilio, Simone, di Bona, Alessandro, Paolicelli, Guido, Mescola, Andrea, D’Addato, Sergio, Torelli, Piero, Benedetti, Stefania
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8472809/ https://www.ncbi.nlm.nih.gov/pubmed/34577322 http://dx.doi.org/10.3390/s21186114

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