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Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode
Production of high-aspect-ratio silicon (Si) nanowire-based anode for lithium ion batteries is challenging particularly in terms of controlling wire property and geometry to improve the battery performance. This report demonstrates tunable optimization of inductively coupled plasma reactive ion etch...
Autores principales: | , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8492725/ https://www.ncbi.nlm.nih.gov/pubmed/34611222 http://dx.doi.org/10.1038/s41598-021-99173-4 |
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author | Refino, Andam Deatama Yulianto, Nursidik Syamsu, Iqbal Nugroho, Andika Pandu Hawari, Naufal Hanif Syring, Alina Kartini, Evvy Iskandar, Ferry Voss, Tobias Sumboja, Afriyanti Peiner, Erwin Wasisto, Hutomo Suryo |
author_facet | Refino, Andam Deatama Yulianto, Nursidik Syamsu, Iqbal Nugroho, Andika Pandu Hawari, Naufal Hanif Syring, Alina Kartini, Evvy Iskandar, Ferry Voss, Tobias Sumboja, Afriyanti Peiner, Erwin Wasisto, Hutomo Suryo |
author_sort | Refino, Andam Deatama |
collection | PubMed |
description | Production of high-aspect-ratio silicon (Si) nanowire-based anode for lithium ion batteries is challenging particularly in terms of controlling wire property and geometry to improve the battery performance. This report demonstrates tunable optimization of inductively coupled plasma reactive ion etching (ICP-RIE) at cryogenic temperature to fabricate vertically-aligned silicon nanowire array anodes with high verticality, controllable morphology, and good homogeneity. Three different materials [i.e., photoresist, chromium (Cr), and silicon dioxide (SiO(2))] were employed as masks during the subsequent photolithography and cryogenic ICP-RIE processes to investigate their effects on the resulting nanowire structures. Silicon nanowire arrays with a high aspect ratio of up to 22 can be achieved by tuning several etching parameters [i.e., temperature, oxygen/sulfur hexafluoride (O(2)/SF(6)) gas mixture ratio, chamber pressure, plasma density, and ion energy]. Higher compressive stress was revealed for longer Si wires by means of Raman spectroscopy. Moreover, an anisotropy of lattice stress was found at the top and sidewall of Si nanowire, indicating compressive and tensile stresses, respectively. From electrochemical characterization, half-cell battery integrating ICP-RIE-based silicon nanowire anode exhibits a capacity of 0.25 mAh cm(−2) with 16.67% capacity fading until 20 cycles, which has to be improved for application in future energy storage devices. |
format | Online Article Text |
id | pubmed-8492725 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2021 |
publisher | Nature Publishing Group UK |
record_format | MEDLINE/PubMed |
spelling | pubmed-84927252021-10-07 Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode Refino, Andam Deatama Yulianto, Nursidik Syamsu, Iqbal Nugroho, Andika Pandu Hawari, Naufal Hanif Syring, Alina Kartini, Evvy Iskandar, Ferry Voss, Tobias Sumboja, Afriyanti Peiner, Erwin Wasisto, Hutomo Suryo Sci Rep Article Production of high-aspect-ratio silicon (Si) nanowire-based anode for lithium ion batteries is challenging particularly in terms of controlling wire property and geometry to improve the battery performance. This report demonstrates tunable optimization of inductively coupled plasma reactive ion etching (ICP-RIE) at cryogenic temperature to fabricate vertically-aligned silicon nanowire array anodes with high verticality, controllable morphology, and good homogeneity. Three different materials [i.e., photoresist, chromium (Cr), and silicon dioxide (SiO(2))] were employed as masks during the subsequent photolithography and cryogenic ICP-RIE processes to investigate their effects on the resulting nanowire structures. Silicon nanowire arrays with a high aspect ratio of up to 22 can be achieved by tuning several etching parameters [i.e., temperature, oxygen/sulfur hexafluoride (O(2)/SF(6)) gas mixture ratio, chamber pressure, plasma density, and ion energy]. Higher compressive stress was revealed for longer Si wires by means of Raman spectroscopy. Moreover, an anisotropy of lattice stress was found at the top and sidewall of Si nanowire, indicating compressive and tensile stresses, respectively. From electrochemical characterization, half-cell battery integrating ICP-RIE-based silicon nanowire anode exhibits a capacity of 0.25 mAh cm(−2) with 16.67% capacity fading until 20 cycles, which has to be improved for application in future energy storage devices. Nature Publishing Group UK 2021-10-05 /pmc/articles/PMC8492725/ /pubmed/34611222 http://dx.doi.org/10.1038/s41598-021-99173-4 Text en © The Author(s) 2021 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) . |
spellingShingle | Article Refino, Andam Deatama Yulianto, Nursidik Syamsu, Iqbal Nugroho, Andika Pandu Hawari, Naufal Hanif Syring, Alina Kartini, Evvy Iskandar, Ferry Voss, Tobias Sumboja, Afriyanti Peiner, Erwin Wasisto, Hutomo Suryo Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode |
title | Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode |
title_full | Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode |
title_fullStr | Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode |
title_full_unstemmed | Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode |
title_short | Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode |
title_sort | versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8492725/ https://www.ncbi.nlm.nih.gov/pubmed/34611222 http://dx.doi.org/10.1038/s41598-021-99173-4 |
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