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Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode

Production of high-aspect-ratio silicon (Si) nanowire-based anode for lithium ion batteries is challenging particularly in terms of controlling wire property and geometry to improve the battery performance. This report demonstrates tunable optimization of inductively coupled plasma reactive ion etch...

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Detalles Bibliográficos
Autores principales:	Refino, Andam Deatama, Yulianto, Nursidik, Syamsu, Iqbal, Nugroho, Andika Pandu, Hawari, Naufal Hanif, Syring, Alina, Kartini, Evvy, Iskandar, Ferry, Voss, Tobias, Sumboja, Afriyanti, Peiner, Erwin, Wasisto, Hutomo Suryo
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8492725/ https://www.ncbi.nlm.nih.gov/pubmed/34611222 http://dx.doi.org/10.1038/s41598-021-99173-4

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