Micropipes in SiC Single Crystal Observed by Molten KOH Etching

Micropipe, a “killer” defect in SiC crystals, severely hampers the outstanding performance of SiC-based devices. In this paper, the etching behavior of micropipes in 4H-SiC and 6H-SiC wafers was studied using the molten KOH etching method. The spectra of 4H-SiC and 6H-SiC crystals containing micropi...

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Detalles Bibliográficos
Autores principales: Wang, Hejing, Yu, Jinying, Hu, Guojie, Peng, Yan, Xie, Xuejian, Hu, Xiaobo, Chen, Xiufang, Xu, Xiangang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8510436/
https://www.ncbi.nlm.nih.gov/pubmed/34640288
http://dx.doi.org/10.3390/ma14195890

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8510436/
https://www.ncbi.nlm.nih.gov/pubmed/34640288
http://dx.doi.org/10.3390/ma14195890

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