Effects and Mechanism of Surface Water Wettability and Operating Frequency on Response Linearity of Flexible IDE Capacitive Humidity Sensor

Flexible capacitive humidity sensors are promising for low-cost, wearable, and radio frequency identification sensors, but their nonlinear response is an important issue for practical applications. Herein, the linearity of humidity response was controlled by surface water wettability and operating frequency of sensor, and the mechanism was explained in detail by surface water condensation. For a sensor with a Ag interdigitated electrode (IDE) on a poly(ethylene terephthalate) substrate, the capacitance showed a small linear increase with humidity up to 70% RH but a large nonlinear increase in the higher range. The response linearity was increased by a hydrophobic surface treatment of self-assembled monolayer coating while it was decreased by an ultraviolet/ozone irradiation for hydrophilicity. It was also increased by increasing the frequency in the range of 1–100 kHz, more prominently on a more hydrophilic surface. Based on experiment and simulation, the increase in sensor capacitance was greatly dependent on the geometric pattern (e.g., size, number, and contact angle) and electrical permittivity of surface water droplets. A larger and more nonlinear humidity response resulted from a larger increase in the number of droplets with a smaller contact angle on a sensor surface with higher water wettability and also from a higher permittivity of water at a lower frequency.