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An LC Wireless Passive Pressure Sensor Based on Single-Crystal MgO MEMS Processing Technique for High Temperature Applications

An LC wireless passive pressure sensor based on a single-crystalline magnesium oxide (MgO) MEMS processing technique is proposed and experimentally demonstrated for applications in environmental conditions of 900 °C. Compared to other high-temperature resistant materials, MgO was selected as the sen...

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Detalles Bibliográficos
Autores principales:	Jia, Pinggang, Liu, Jia, Qian, Jiang, Ren, Qianyu, An, Guowen, Xiong, Jijun
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Communication
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8512693/ https://www.ncbi.nlm.nih.gov/pubmed/34640922 http://dx.doi.org/10.3390/s21196602

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