Theoretical Study of the Mechanism for the Reaction of Trimethylaluminum with Ozone

[Image: see text] The mechanism for the reaction of trimethylaluminum (TMA, Al(CH(3))(3)) with ozone (O(3)) was investigated in detail using density functional theory calculations to understand the atomic layer deposition processes that form aluminum oxide surfaces. We examined the reactions of TMA...

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Detalles Bibliográficos
Autores principales: Kayanuma, Megumi, Choe, Yoong-Kee, Hagiwara, Takayuki, Kameda, Naoto, Shimoi, Yukihiro
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2021
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8515592/
https://www.ncbi.nlm.nih.gov/pubmed/34660987
http://dx.doi.org/10.1021/acsomega.1c03326

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8515592/
https://www.ncbi.nlm.nih.gov/pubmed/34660987
http://dx.doi.org/10.1021/acsomega.1c03326

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