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Theoretical Study of the Mechanism for the Reaction of Trimethylaluminum with Ozone
[Image: see text] The mechanism for the reaction of trimethylaluminum (TMA, Al(CH(3))(3)) with ozone (O(3)) was investigated in detail using density functional theory calculations to understand the atomic layer deposition processes that form aluminum oxide surfaces. We examined the reactions of TMA...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical Society
2021
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8515592/ https://www.ncbi.nlm.nih.gov/pubmed/34660987 http://dx.doi.org/10.1021/acsomega.1c03326 |