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Study of the Peak to Background (P/B) Method Behavior as a Function of Take-Off Angle, Tilt Angle, Particle Size, and Beam Energy

Monte Carlo simulations were performed to investigate the behavior of the peak to background ratio (P/B) of particles on a substrate as a function of different variables such as take-off angle, tilt angle, particle size, and beam energy. The results showed that the P/B highly depends on the beam ene...

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Detalles Bibliográficos
Autores principales: Bayazid, Seyed Mahmoud, Yuan, Yu, Gauvin, Raynald
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Hindawi 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8519717/
https://www.ncbi.nlm.nih.gov/pubmed/34707751
http://dx.doi.org/10.1155/2021/8070721
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author Bayazid, Seyed Mahmoud
Yuan, Yu
Gauvin, Raynald
author_facet Bayazid, Seyed Mahmoud
Yuan, Yu
Gauvin, Raynald
author_sort Bayazid, Seyed Mahmoud
collection PubMed
description Monte Carlo simulations were performed to investigate the behavior of the peak to background ratio (P/B) of particles on a substrate as a function of different variables such as take-off angle, tilt angle, particle size, and beam energy. The results showed that the P/B highly depends on the beam energy, the size of particles, and the composition of the substrates. Results showed that the rate of intensity reduction of the peak is less than the background for a high tilt angle (60 degrees), and thereby, the P/B increases at a high tilt angle. It was shown that by increasing the take-off angle, the P/B initially reduces and then reaches a plateau. Results showed that the P/B highly depends on the size of particles. Analyses showed that by moving the electron beam from the center to the side of the particle, the P/B increases. Finally, the spherical particles have higher sensitivity of the P/B to the beam position than the cubical particles.
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spelling pubmed-85197172021-10-26 Study of the Peak to Background (P/B) Method Behavior as a Function of Take-Off Angle, Tilt Angle, Particle Size, and Beam Energy Bayazid, Seyed Mahmoud Yuan, Yu Gauvin, Raynald Scanning Research Article Monte Carlo simulations were performed to investigate the behavior of the peak to background ratio (P/B) of particles on a substrate as a function of different variables such as take-off angle, tilt angle, particle size, and beam energy. The results showed that the P/B highly depends on the beam energy, the size of particles, and the composition of the substrates. Results showed that the rate of intensity reduction of the peak is less than the background for a high tilt angle (60 degrees), and thereby, the P/B increases at a high tilt angle. It was shown that by increasing the take-off angle, the P/B initially reduces and then reaches a plateau. Results showed that the P/B highly depends on the size of particles. Analyses showed that by moving the electron beam from the center to the side of the particle, the P/B increases. Finally, the spherical particles have higher sensitivity of the P/B to the beam position than the cubical particles. Hindawi 2021-10-08 /pmc/articles/PMC8519717/ /pubmed/34707751 http://dx.doi.org/10.1155/2021/8070721 Text en Copyright © 2021 Seyed Mahmoud Bayazid et al. https://creativecommons.org/licenses/by/4.0/This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
spellingShingle Research Article
Bayazid, Seyed Mahmoud
Yuan, Yu
Gauvin, Raynald
Study of the Peak to Background (P/B) Method Behavior as a Function of Take-Off Angle, Tilt Angle, Particle Size, and Beam Energy
title Study of the Peak to Background (P/B) Method Behavior as a Function of Take-Off Angle, Tilt Angle, Particle Size, and Beam Energy
title_full Study of the Peak to Background (P/B) Method Behavior as a Function of Take-Off Angle, Tilt Angle, Particle Size, and Beam Energy
title_fullStr Study of the Peak to Background (P/B) Method Behavior as a Function of Take-Off Angle, Tilt Angle, Particle Size, and Beam Energy
title_full_unstemmed Study of the Peak to Background (P/B) Method Behavior as a Function of Take-Off Angle, Tilt Angle, Particle Size, and Beam Energy
title_short Study of the Peak to Background (P/B) Method Behavior as a Function of Take-Off Angle, Tilt Angle, Particle Size, and Beam Energy
title_sort study of the peak to background (p/b) method behavior as a function of take-off angle, tilt angle, particle size, and beam energy
topic Research Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8519717/
https://www.ncbi.nlm.nih.gov/pubmed/34707751
http://dx.doi.org/10.1155/2021/8070721
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