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Study of the Peak to Background (P/B) Method Behavior as a Function of Take-Off Angle, Tilt Angle, Particle Size, and Beam Energy

Monte Carlo simulations were performed to investigate the behavior of the peak to background ratio (P/B) of particles on a substrate as a function of different variables such as take-off angle, tilt angle, particle size, and beam energy. The results showed that the P/B highly depends on the beam ene...

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Detalles Bibliográficos
Autores principales: Bayazid, Seyed Mahmoud, Yuan, Yu, Gauvin, Raynald
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Hindawi 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8519717/
https://www.ncbi.nlm.nih.gov/pubmed/34707751
http://dx.doi.org/10.1155/2021/8070721